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Deep-UV LED encapsulants
Usage summary
CYTOP® is focused on as a material for use in “Deep-UV LED encapsulants” for its transparency and also due to its durability as compared to epoxy resins and silicon resins. One CYTOP® application is “pellicles” on photomasks preventing particle contamination. This “pellicle” is a vital material for the exposure process of semiconductor manufacturing, and since they are in an environment that is irradiated with exposure wavelength ArF (193nm) and KrF (248nm), CYTOP® is considered as an encapsulant material in UV-C (200-280nm) LEDs.