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AL-Polymer ™ - FAQ
- Please tell me about your resist types.
- AL-polymer™ is a negative tone solvent development type.
- Tell me about the deposition process.
- We recommend using the spin coat method to deposit onto the wafer.
- Tell me about what film thicknesses are possible for deposition.
- Depending on the part number, film thicknesses of 1.5-3.5μm and 3.5-10μm are possible.
- Tell me about the water absorbency.
- Water absorbency is low at 0.3% (@85°C/85%RH).
