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- CYTOP®
- CYTOP® Usage
- “Pellicle” is a thin film on photomasks preventing particle contamination
“Pellicle” is a thin film on photomasks preventing particle contamination
Usage summary
A “pellicle” is a product that prevents the reduction in production yield during the exposure process in semiconductor manufacturing. “Pellicles” are vital materials in the exposure process in semiconductor manufacturing, and they are used in an environment that is irradiated with exposure wavelength ArF (193nm) and KrF (248nm). Since CYTOP® has the rare characteristic of also transmitting deep UV light, it is used as a material in “pellicles”.
